New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array [Correspondence]
نویسندگان
چکیده
منابع مشابه
Fabrication and characterization of annular-array, high-frequency, ultrasonic transducers based on PZT thick film
In this work, low temperature deposition of ceramics, in combination with micromachining techniques have been used to fabricate a kerfed, annular–array, high–frequency, micro ultrasonic transducer (with seven elements). This transducer was based on PZT thick film and operated in thickness mode. The 27 μm thick PZT film was fabricated using a low temperature (720 oC) composite sol-gel ceramic (s...
متن کاملSCIENTIFIC CORRESPONDENCE 20 MHz high frequency ultrasound assessment of scleral and intraocular conjunctival squamous cell carcinoma
Aim: To assess in a prospective manner, high frequency ultrasound diagnosis of deep invasion by conjunctival squamous cell carcinoma. Methods: Prospective, non-randomised case series comparing 20 MHz high frequency ultrasonographic and clinicopathological data. Results: 20 MHz high frequency ultrasound delineated the degree of deep involvement of this tumour into the sclera, globe, and orbit. T...
متن کاملHigh-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
The thermoelastic effect was used to produce high-frequency, broadband ultrasound in water. A pulsed diode laser, followed by an erbium-doped fiber amplifier, was focused onto a light-absorbing film deposited on a glass substrate. Conversion efficiency was improved by over 20 dB using an elastomeric film instead of a more commonly used metallic one. Radiation pattern measurements show that cons...
متن کاملFabrication and structural characterization of a resonant frequency PZT microcantilever
The fabrication and structural characterization of a surface micromachined, resonant frequency, Pb(Zr, Ti)O3 (PZT) microcantilever will be presented. The PZT microcantilever was fabricated using surface micromachining techniques, and used a low-stress silicon nitride thin film as the base material for the microcantilever onto which a PZT thin film was incorporated. The PZT thin film is used as ...
متن کاملA Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works i...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
سال: 2013
ISSN: 0885-3010,1525-8955
DOI: 10.1109/tuffc.2013.2635